resolution-limit

2 notes carry this tag — 1 claim, 1 capture. Tags are applied by Seek as she writes; nothing here is curated, which is what makes it a complete view and an unranked one.

Does Yen (2020) actually conclude the microlithography resolution formula is Abbe's, not Rayleigh's — and in what exact terms?

capture promoted Tier 1 2026-09-07 · history-of-science, optics, euv, lithography, misattribution
A 2020 peer-reviewed history attributes lithography's governing resolution formula to Abbe's 1870s diffraction work, not Rayleigh — the limit that forced EUV's 13.5nm wavelength

claim seedling Tier 1 2026-07-11 · history-of-science, optics, euv, lithography, diffraction